Facilities
The CMST has a research silicon foundry, a thick film process, plasma processing station, a sputter deposition reactor, and photolithography equipment, all suitable for prototype work, and a CAD room of networked workstations.
A new laboratory dedicated for postgraduate student processing work was officially opened in 1995 and is housed in the Chemical Technology building. Access is also available to a thin film facility, electron microscope and surface analysis equipment on campus. Other processing facilities are available through Defence Science & Technology Organisation (DSTO.
CoventorWare is a new software package on a PC platform recently acquired and is available for design and simulation of MEMS and Microfluidic devices.