Courses
The staff of the Centre for Microsystems Technology are involved in teaching a whole suit of courses in undergraduate and postgraduate programs.
The Centre lends expertise to three courses which specialise in microsystems design and fabrication, information for these courses are listed below.
Micro
Engineering Technology (link to the content information for this course)
Topics:
Principles and laboratory techniques used in
solid state electronics research. Basic familiarity with practices and
equipment used in the microfabrication clean room. Laboratory safety;
materials handling, storage and disposal; clean room use; photoresist
characteristics; mounting, bonding, and probing; wet chemical etching;
vacuum evaporation; patterning of metal films using photoresist. CMOS
process, IC fabrication, micromachining technology.
Introduction
to Microelectromechanical Systems (link to the content information for
this course)
Microelectromechanical Systems, commonly called MEMS, is the discipline
responsible for the design and fabrication of very small electromechanical
components that are smaller than the size of a grain of sand or about the
size of a dust mite (as shown here). The discipline has now evolved to
include other non-mechanical devices.
VLSI Design G (link to the content information for this course)